Report DTuC7, Diffractive Optics and Micro-Optics Conference, Rochester (NY), 2004

Combination of blazed and laterally blazed structures

Bernd H. Kleemann ^a, R. Arnold ^b, J. Ruoff ^a

^a Carl Zeiss, D-73446 Oberkochen, and
^b Carl Zeiss SMT AG, D-73447 Oberkochen

Abstract:
We present a new type of sub-wavelength blazed grating characterized by structures having a “pieslice” form with sub-wavelength feature sizes in the direction lateral to the dispersion direction. We rigorously compute efficiency curves and compare them to binary blazed and conventional échelette gratings. We find that in the resonance domain the performance of laterally blazed structures is superior to conventional blaze gratings. For very small periods binary blazed gratings show the best performance, which is a consequence of a wave guiding phenomenon occurring in the sub-wavelength ridges. Outside this region, however, the laterally blazed gratings have comparable blaze efficiencies.

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